JPH0530275Y2 - - Google Patents
Info
- Publication number
- JPH0530275Y2 JPH0530275Y2 JP8790089U JP8790089U JPH0530275Y2 JP H0530275 Y2 JPH0530275 Y2 JP H0530275Y2 JP 8790089 U JP8790089 U JP 8790089U JP 8790089 U JP8790089 U JP 8790089U JP H0530275 Y2 JPH0530275 Y2 JP H0530275Y2
- Authority
- JP
- Japan
- Prior art keywords
- arc
- deceleration
- extraction
- current value
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000605 extraction Methods 0.000 claims description 50
- 150000002500 ions Chemical class 0.000 claims description 47
- 238000010891 electric arc Methods 0.000 claims description 22
- 238000010884 ion-beam technique Methods 0.000 description 15
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8790089U JPH0530275Y2 (en]) | 1989-06-15 | 1989-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8790089U JPH0530275Y2 (en]) | 1989-06-15 | 1989-06-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0310455U JPH0310455U (en]) | 1991-01-31 |
| JPH0530275Y2 true JPH0530275Y2 (en]) | 1993-08-03 |
Family
ID=31637539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8790089U Expired - Lifetime JPH0530275Y2 (en]) | 1989-06-15 | 1989-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530275Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4764096B2 (ja) * | 2005-08-09 | 2011-08-31 | ネクスタ株式会社 | 農作物保護性と施工性の高い農業用防虫、防鳥ネット |
-
1989
- 1989-06-15 JP JP8790089U patent/JPH0530275Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0310455U (en]) | 1991-01-31 |
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